Bilayer film including an underlayer having vertical acid transport properties
US7585609B2 · kind B2 · utility
3Cited by
17References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2006 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Jul 25, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0392
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides methods for forming images in positive- or negative-tone chemically amplified photoresists. The methods of the present invention rely on the vertical up-diffusion of photoacid generated by patternwise imaging of an underlayer disposed on a substrate and overcoated with a polymer containing acid labile functionality. In accordance with the present invention, the vertical up-diffusion can be the sole mechanism for imaging formation or the methods of the present invention can be used in conjunction with conventional imaging processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.