Microfabricated cantilever chip
US7586105B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 19, 2007 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Sep 13, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2007
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a device and system from doing mechanical and electrical measurements and manipulation on nano or micro sized objects using a sample holder adapted to fit in situ of a transmission electron microscope. The sample holder comprise at least two arms each with at least one connector whereby the sample (206) may be mounted between the two connectors forming a bridge closing a gap between the two arms of the sample holder. The sample holder is arranged to provide mechanical forces to a sample mounted on the sample holder and measuring and/or applying electrical signals from the sample while at the same imaging using the transmission electron microscope. Each arm of the sample holder may comprise three substantially parallel beams for electro-thermal actuation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.