Polarization imaging
US7586607B2 · kind B2 · utility
8Cited by
12References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 23, 2007 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Jun 17, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/21
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for inspection a substrate for various defects is herein disclosed. Polarizing filters are used to improve the contrast of polarization dependent defects such as defocus and exposure defects, while retaining the same sensitivity to polarization independent defects, such as pits, voids, cracks, chips and particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.