Patent · US Active

Wafer-level testing of optical and optoelectronic chips

US7586608B1 · kind B1 · utility

18Cited by
13References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 28, 2007
Grant dateSep 8, 2009
Priority date
Expiry dateMar 28, 2027

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/4224
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.