Camera and illumination matching for inspection system
US7589783B2 · kind B2 · utility
2Cited by
29References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2004 |
| Grant date | Sep 15, 2009 |
| Priority date | — |
| Expiry date | Jan 6, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection tool includes a camera having a gain value and an offset value set to provide a first camera output indicating a first desired average gray value when the camera is illuminated with a precision light source set at a first light level. The inspection tool includes an inspection light source configured to be set at a second light level such that when the inspection light source illuminates a known target, the camera provides a second output indicating a second desired average gray value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.