Actuator device

US7589921B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Yim-Bun Patrick Kwan · Aalen, DE
• Stefan Xalter · Oberkochen, DE

Key dates

• Filing date: Aug 23, 2007
• Grant date: Sep 15, 2009
• Expiry date: Aug 23, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70825
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Actuator devices, as well as related systems and methods, are disclosed. In some embodiments, the devices, systems and methods are within the field of microlithography. In some embodiments, a system can include an optical element unit having an optical element, a support structure supporting the optical element, and an actuator device connected to the optical element and configured to exert an actuation force onto the optical element along a direction of actuation. The actuator device can include an actuation unit which includes a linking section that links first and second sections of the actuation unit.