MEMS structure having a compensated resonating member
US7591201B1 · kind B1 · utility
21Cited by
12References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2007 |
| Grant date | Sep 22, 2009 |
| Priority date | — |
| Expiry date | Dec 28, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/113
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A MEMS structure having a compensated resonating member is described. In an embodiment, a MEMS structure comprises a resonating member coupled to a substrate by an anchor. A dynamic mass-load is coupled with the resonating member. The dynamic mass-load is provided for compensating a change in frequency of the resonating member by altering the moment of inertia of the resonating member by way of a positional change relative to the anchor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.