Inventor · Corona, CA, US

Emmanuel P. Quevy

53Patents
15h-index
19Co-inventors
77Inventor score

Filing activity: May 3, 2005 → Jun 25, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8349635B1 Encapsulated MEMS device and method to form the same Physics 214 Active
US7923790B1 Planar microshells for vacuum encapsulated devices and damascene method of manufacture Performing Operations; Transporting 92 Active
US7211926B2 Temperature compensated oscillator including MEMS resonator for frequency control Electricity 92 Expired
US7639104B1 Method for temperature compensation in MEMS resonators with isolated regions of distinct material Emerging Cross-Sectional Technologies 67 Active
US7514760B1 IC-compatible MEMS structure Electricity 64 Active
US7659150B1 Microshells for multi-level vacuum cavities Electricity 57 Active
US7256107B2 Damascene process for use in fabricating semiconductor structures having micro/nano gaps Emerging Cross-Sectional Technologies 36 Expired
US7595209B1 Low stress thin film microshells Electricity 32 Active
US8288835B2 Microshells with integrated getter layer Performing Operations; Transporting 25 Active
US7736929B1 Thin film microshells incorporating a getter layer Performing Operations; Transporting 23 Active
US7982550B1 Highly accurate temperature stable clock based on differential frequency discrimination of oscillators Electricity 22 Active
US7591201B1 MEMS structure having a compensated resonating member Emerging Cross-Sectional Technologies 21 Active
US7514853B1 MEMS structure having a stress inverter temperature-compensated resonating member Electricity 20 Active
US8313970B2 Planar microshells for vacuum encapsulated devices and damascene method of manufacture Performing Operations; Transporting 20 Active
US7999635B1 Out-of plane MEMS resonator with static out-of-plane deflection Electricity 16 Active
US7876167B1 Hybrid system having a non-MEMS device and a MEMS device Electricity 15 Active
US7956517B1 MEMS structure having a stress inverter temperature-compensated resonator member Electricity 12 Active
US8436690B2 Hybrid system having a non-MEMS device and a MEMS device Electricity 11 Active
US8878528B2 MEMS-based magnetic sensor with a Lorentz force actuator used as force feedback Physics 10 Active
US8273594B2 Planar microshells for vacuum encapsulated devices and damascene method of manufacture Performing Operations; Transporting 9 Active
US8461935B2 Hybrid system having a non-MEMS device and a MEMS device Electricity 9 Active
US7858422B1 MEMS coupler and method to form the same Performing Operations; Transporting 8 Active
US8258893B2 Out-of-plane MEMS resonator with static out-of-plane deflection Electricity 7 Active
US9000833B2 Compensation of changes in MEMS capacitive transduction Electricity 6 Active
US8852984B1 Technique for forming a MEMS device Performing Operations; Transporting 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.