All surface data for use in substrate inspection
US7593565B2 · kind B2 · utility
8Cited by
15References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 7, 2005 |
| Grant date | Sep 22, 2009 |
| Priority date | — |
| Expiry date | Sep 28, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.