Patent · US Active

Method and apparatus for specifying working position on a sample and method of working the sample

US7595488B2 · kind B2 · utility

1Cited by
26References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 21, 2005
Grant dateSep 29, 2009
Priority date
Expiry dateJun 19, 2026

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2487
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Techniques for specifying an observing or working position of a sample are provided. Digitized data of a sample is obtained and stored in a 1st storage device. A 1st display area displays an image of a portion containing a desired observing or working position of the digitized data stored in the 1st storage device. A 1st position that is indicated by a pointing device on the 1st display area is stored in a 2nd storage device. The sample is moved to an observing or working position for observation, and an observation image of the sample is stored in the 3rd storage device. A 2nd display area displays the observation image of the sample stored in the 3rd storage device. A position indicated on the 2nd display area and corresponding to the 1st position stored in the 2nd storage device is stored in a 4th storage device. A conversion function for converting a coordinate system of the 1st display area and the 2nd display area is calculated using the 1st position stored in the 2nd storage means and the position stored in the 4th storage device. A position indicated in one of the 1st and 2nd display areas and corresponding to another position indicated in the other of the 1st and 2nd displ…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.