Target alignment for X-ray scattering measurements
US7600916B2 · kind B2 · utility
19Cited by
27References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2007 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Apr 10, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/201
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on a structure in the sample such that the X-rays are scattered from the structure in a pattern of stripes, and receiving the scattered X-rays using an array of detectors. A relative alignment between the sample and the array is adjusted so that the stripes are parallel to the detectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.