Inventor · Rekhasim, IL

David Berman

18Patents
12h-index
20Co-inventors
74Inventor score

Filing activity: Apr 12, 2001 → Jul 12, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US6512814B2 X-ray reflectometer Physics 62 Expired
US6639968B2 X-ray reflectometer Physics 51 Expired
US7406153B2 Control of X-ray beam spot size Physics 46 Active
US7068753B2 Enhancement of X-ray reflectometry by measurement of diffuse reflections Physics 21 Expired
US8437450B2 Fast measurement of X-ray diffraction from tilted layers Physics 19 Active
US7600916B2 Target alignment for X-ray scattering measurements Physics 19 Active
US8687766B2 Enhancing accuracy of fast high-resolution X-ray diffractometry Physics 19 Active
US6947520B2 Beam centering and angle calibration for X-ray reflectometry Physics 19 Expired
US7062013B2 X-ray reflectometry of thin film layers with enhanced accuracy Physics 18 Expired
US8243878B2 High-resolution X-ray diffraction measurement with enhanced sensitivity Physics 18 Active
US6895071B2 XRR detector readout processing Physics 16 Expired
US7653174B2 Inspection of small features using X-ray fluorescence Physics 14 Active
US7130376B2 X-ray reflectometry of thin film layers with enhanced accuracy Physics 12 Expired
US7474732B2 Calibration of X-ray reflectometry system Physics 9 Expired
US7231016B2 Efficient measurement of diffuse X-ray reflections Physics 8 Expired
US7453985B2 Control of X-ray beam spot size Physics 6 Active
US8731138B2 High-resolution X-ray diffraction measurement with enhanced sensitivity Physics 6 Active
US7649978B2 Automated selection of X-ray reflectometry measurement locations Physics 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.