Phase and frequency control of a radio frequency generator from an external source
US7602127B2 · kind B2 · utility
98Cited by
12References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 18, 2005 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Apr 4, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.