Device and method for supplying short-wavelength light
US7602824B2 · kind B2 · utility
0Cited by
3References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 6, 2006 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Oct 13, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70575
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention broadly comprises a device for supplying light at an illumination wavelength shorter than 300 nm. The device includes a first subassembly, having a light source for delivering light at a wavelength that is at least twice as long as the illumination wavelength; a second subassembly having at least one means for wavelength reduction; and a light guide that guides the light from the light source of the first subassembly into the second subassembly. The present invention also broadly comprises a method for supplying light at an illumination wavelength shorter than 300 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.