Michael Heiden
23Patents
3h-index
9Co-inventors
48Inventor score
Filing activity: Mar 23, 2006 → Aug 10, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD627029S1 | Arrow rest | General | 13 | Expired |
| USD644289S1 | Decorative deerskin arrowhead | General | 10 | Expired |
| US7694426B2 | Method for eliminating sources of error in the system correction of a coordinate measuring machine | Physics | 5 | Active |
| US7903259B2 | Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device | Physics | 3 | Active |
| US7382450B2 | Method of detecting an edge bead removal line on a wafer | Electricity | 3 | Active |
| US8305587B2 | Apparatus for the optical inspection of wafers | Physics | 3 | Active |
| US7654007B2 | Method for improving the reproducibility of a coordinate measuring apparatus and its accuracy | Physics | 2 | Active |
| US8582113B2 | Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device | Physics | 2 | Active |
| US8390927B2 | Element for homogenizing the illumination with simultaneous setting of the polarization degree | Physics | 2 | Active |
| US7889338B2 | Coordinate measuring machine and method for structured illumination of substrates | Physics | 2 | Active |
| US7545489B2 | Apparatus and method of inspecting the surface of a wafer | Physics | 1 | Active |
| US7680616B2 | Method for correcting an error of the imaging system of a coordinate measuring machine | Physics | 1 | Active |
| US7986409B2 | Method for determining the centrality of masks | Physics | 1 | Active |
| US7978340B2 | System and method for determining positions of structures on a substrate | Physics | 1 | Active |
| US7769556B2 | Method for correcting measuring errors caused by the lens distortion of an objective | Physics | 1 | Active |
| US7602824B2 | Device and method for supplying short-wavelength light | Physics | 0 | Active |
| US7864319B2 | Device and method for determining an optical property of a mask | Physics | 0 | Active |
| US7939789B2 | Method for reproducibly determining geometrical and/or optical object characteristics | Electricity | 0 | Active |
| US7961334B2 | Coordinate measuring machine for measuring structures on a substrate | Electricity | 0 | Active |
| US7929149B2 | Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machine | Physics | 0 | Active |
| US8154595B2 | Device and method for automatic detection of incorrect measurements by means of quality factors | Electricity | 0 | Active |
| US8102541B2 | Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structures | Physics | 0 | Active |
| US7561263B2 | Apparatus for illuminating and inspecting a surface | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.