Reticle box transport cart
US7604306B1 · kind B1 · utility
4Cited by
34References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 23, 2001 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | Jun 20, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB62B2501/02
- WIPO fieldTransport
- WIPO sectorMechanical engineering
Abstract
A new transportation cart is provided that separates each reticle box or container from other reticle boxes contained in the cart. The transportation cart provides additional shock absorption, thus eliminating effects of vibration of the reticles, the transportation cart is equipped with ESD protection and provides improved security to the transported reticles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.