Vibration-type cantilever holder and scanning probe microscope
US7605368B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2006 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | Sep 19, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body. The holder allows the cantilever to vibrate according to the vibrational characteristics of only the cantilever by counteracting additional vibrations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.