Semiconductor test apparatus for simultaneously testing plurality of semiconductor devices
US7607056B2 · kind B2 · utility
2Cited by
33References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2005 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | May 26, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F11/263
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed herein is a semiconductor test apparatus for simultaneously testing a plurality of semiconductor devices. The semiconductor test apparatus includes a plurality of pattern generation boards, a DUT board, a backplane board, and a power supply unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.