Method for enhancing the measurement capability of multi-parameter inspection systems
US7610170B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2007 |
| Grant date | Oct 27, 2009 |
| Priority date | — |
| Expiry date | Sep 29, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1296
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for improving the measurement capability of multi-parameter inspection systems includes performing a measuring procedure to acquire a measured signature of a sample, calculating weighting factors representing a correlation between structural parameters of the sample by using a weighting algorithm, transforming the weighting factors into a sampling function by using a transforming rule, updating the measured signature to form an updated measured signature and generating a plurality of updated nominal signatures according to the sampling function, and comparing the updated measured signature and the updated nominal signatures to determine the structural parameters of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.