Scanning probe microscope fine-movement mechanism and scanning probe microscope using same
US7614288B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2007 |
| Grant date | Nov 10, 2009 |
| Priority date | — |
| Expiry date | Dec 27, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inching mechanism for a scanning probe microscope capable of performing measurement with high precision while enhancing the scanning speed by a probe furthermore, and a scanning probe microscope comprising it. The inching mechanism for a scanning probe microscope which is provided in a scanning probe microscope (SPM) (1) having a stage (16) for mounting a sample S, and a probe (20) approaching closely to or touching the surface of the sample S, characterized in that the inching mechanism comprises a first drive section and a second drive section provided independently, a probe inching mechanism (26) having the first drive section and inching, by the first drive section, the probe (20) in the X direction and Y direction parallel with the surface of the sample S and intersecting each other, and a stage inching mechanism (27) having the second drive section and inching, by the second drive section, the stage (16) in the Z direction perpendicular to the surface of the sample S.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.