Reaction chamber for manufacturing a carbon nanotube, apparatus for manufacturing the carbon nanotube and system for manufacturing the carbon nanotube
US7618599B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2007 |
| Grant date | Nov 17, 2009 |
| Priority date | — |
| Expiry date | Jun 20, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/855
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Disclosed are a reaction chamber for manufacturing a carbon nanotube, an apparatus for manufacturing a carbon nanotube and a system for manufacturing a carbon nanotube. The reaction chamber includes a reaction furnace, a gas inlet, a gas outlet and a heat transfer member. The reaction furnace has a box structure for receiving a substrate wherein the reaction furnace provides a space for forming the carbon nanotube on the substrate. The gas inlet having a through-hole structure formed at a first portion of the reaction furnace and the gas outlet has a through-hole structure formed at a second portion of the reaction furnace. The heat transfer member has at least one rectangular through-hole structure formed at a third portion of the reaction furnace along a direction substantially in parallel to the substrate. The apparatus includes the reaction furnace, a gas supply member, a gas exhausting member and a heating member. The system includes the apparatus and a transfer apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.