Method for providing an anti-stiction coating on a metal surface
US7618682B2 · kind B2 · utility
0Cited by
5References
14Claims
0Family size
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Key dates
| Filing date | Sep 25, 2006 |
| Grant date | Nov 17, 2009 |
| Priority date | — |
| Expiry date | Dec 2, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC10N2080/00
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A method for providing an anti-stiction coating on a metal surface includes reacting a vapor of perfluorooctylhydroxamic acid with the metal surface in a reaction chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.