Optical inspection using variable apodization
US7619735B2 · kind B2 · utility
9Cited by
15References
35Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 14, 2003 |
| Grant date | Nov 17, 2009 |
| Priority date | — |
| Expiry date | Oct 12, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for optical inspection of a surface includes selecting an apodization scheme in response to a characteristic of the surface, and applying an apodizer to apodize a beam of radiation in response to the selected apodization scheme. The apodized beam of radiation is directed to impinge on the surface, whereby a plurality of rays are scattered from the surface, and at least one of the scattered rays is detected, typically in order to detect a defect on the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.