Coated substrates and methods for their preparation
US7622193B2 · kind B2 · utility
0Cited by
6References
7Claims
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Key dates
| Filing date | Aug 12, 2005 |
| Grant date | Nov 24, 2009 |
| Priority date | — |
| Expiry date | Aug 10, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249921
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Coated substrates containing a barrier layer comprising hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3 and methods of preparing the coated substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.