Chamber particle detection system
US7626699B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 17, 2008 |
| Grant date | Dec 1, 2009 |
| Priority date | — |
| Expiry date | Jul 17, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the present invention provide an apparatus and a method for chamber particle source identification. The chamber particle source identification method and apparatus can greatly shorten the time it takes to identify chamber particle source(s). In one embodiment, a chamber particle monitor assembly for a processing chamber is provided. The chamber particle monitor assembly includes at least one laser light source, which can scan laser light in a chamber process volume within the processing chamber. The chamber particle monitor assembly also includes a plurality of laser light collectors, which can collect laser light emitted from the at least one laser light source continuously to monitor particle performance within the processing chamber. The plurality of laser light collectors are placed in the processing chamber such that none of the plurality of laser light collectors share a common axis. The chamber particle monitor assembly further includes an analyzer that analyzes signals representing the laser light collected by the plurality of laser light collectors to provide chamber particle information. The plurality of laser light collectors enables construction of three-…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.