Sensing unit and method of making same
US7628071B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 20, 2007 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Aug 14, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a sensing unit according to the present invention, a movable portion of a spring portion is supported floatably above a recessed portion formed in a substrate. Thus, the movable portion is capable of oscillating in any direction parallel to the substrate surface. Moreover, the movable portion is capable of oscillating in the thickness direction of the substrate such that the amplitude of a center side end portion thereof reaches a maximum. A sensor portion is provided on the movable portion. As a result, the sensing unit according to the present invention has a higher degree of freedom in terms of the measurement direction than a conventional sensing unit that oscillates in only one direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.