Spatial light modulator
US7629197B2 · kind B2 · utility
44Cited by
104References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2006 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Jan 13, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/12
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An interferometric spatial light modulator comprises of two cavities. One is the optical resonant cavity having a partially reflective film and a movable reflective membrane as two walls, and the other is the electromechanical actuation cavity having the movable reflective membrane and a bottom metal layer as electrodes. The spatial light modulator is built on silicon substrate and is actively addressed. A microdisplay apparatus of such spatial light modulators and a projection display system using such microdisplay are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.