Apparatus and method for controlling ion beam
US7629589B2 · kind B2 · utility
4Cited by
4References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2007 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Dec 29, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31701
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus and/or method for controlling an ion beam may be provided, and/or a method for preparing an extraction electrode for the same may be provided. In the apparatus, a plurality of extraction electrodes may be disposed in a path of an ion beam. At least one extraction electrode may include a plurality of sub-grids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.