Electromechanical device with optical function separated from mechanical and electrical function
US7630121B2 · kind B2 · utility
32Cited by
100References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2007 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Jul 2, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/047
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.