Microsystem, more particularly microgyrometer, with capacitive electrode detection element
US7631558B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 9, 2007 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Aug 18, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5747
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The microgyrometer is provided in a flat substrate and comprises detection means for detecting the movement of two oscillating masses in a measuring direction perpendicular to an excitation direction. The detection means comprise an excitation frame associated with each oscillating mass and a mobile detection element surrounded by a corresponding excitation frame and comprising a plurality of mobile electrodes, and first and second sets of interconnected fixed electrodes fixedly secured to the substrate on which they are formed. Each mobile electrode is disposed between associated fixed electrodes of the first and second sets to form two variable differential capacitors. The fixed electrodes of each set are interconnected by means of interconnection bars made of electrically conducting material extending above the fixed electrodes in a plane substantially parallel to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.