Metal-insulator-metal capacitor and method of manufacturing the same
US7633112B2 · kind B2 · utility
8Cited by
7References
11Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 24, 2006 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Mar 2, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A metal-insulator-metal capacitor includes a first electrode in a first wiring level, a second electrode above the first wiring level and extending into a first portion of the first electrode that surrounds the second electrode, and a dielectric film separating the first electrode from the second electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.