Thin film resistor and method of forming the resistor on spaced-apart conductive pads
US7633373B1 · kind B1 · utility
16Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2005 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Oct 26, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01C17/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A thin film resistor is formed to have very accurately defined dimensions which, in turn, allow the resistive value of the resistor to be very accurately defined. The resistor is formed on spaced-apart conductive pads which, in turn, are electrically connected to conductive plugs that are spaced apart from the resistor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.