Patent · US Active

Method to print photoresist lines with negative sidewalls

US7633712B2 · kind B2 · utility

1Cited by

13References

4Claims

0Family size

Assignee

Headway Technologies, Inc. · US

Inventors

Chao-Peng Chen · Fremont, US
Jei-Wei Chang · Cupertino, US
Xiaohong Yang · Shanghai, CN

Key dates

Filing date	Apr 10, 2008
Grant date	Dec 15, 2009
Priority date	—
Expiry date	Apr 10, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S430/143
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A write pole for vertical magnetic recording is described. It includes a trapezoidal prism of high magnetic moment material, having inwardly sloping sidewalls. Its parallel surfaces are between about 0.1 and 0.3 microns apart and the sidewalls slope in the range of 15.5 to 60 degrees relative to vertical.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.