Chucking system comprising an array of fluid chambers
US7635263B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2007 |
| Grant date | Dec 22, 2009 |
| Priority date | — |
| Expiry date | Mar 23, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2043/3472
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention is directed towards a chucking system to hold a substrate, said system including, inter alia, a chuck body having first and second opposed sides, said first side including an array of fluid chambers arranged in rows and columns, said fluid chambers each comprising first and second spaced-apart recesses defining first and second spaced-apart support regions, with said first support region cincturing said second support region and said first and second recesses, and said second support region cincturing said second recess, with said substrate resting against said first and second support regions, with said first recess and a portion of said substrate in superimposition therewith defining a first chamber and said second recess and a portion of said substrate in superimposition therewith defining a second chamber, with each column of said first chambers and each row of said second chambers being in fluid communication with a differing source of fluid to control a flow of fluid in said array of fluid chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.