System and method for inspecting workpieces having microscopic features
US7636466B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2006 |
| Grant date | Dec 22, 2009 |
| Priority date | — |
| Expiry date | Mar 22, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Apparatus for high resolution processing of a generally planar workpiece having microscopic features to be imaged, comprising a video camera acquiring at least two candidate images of a microscopic portion on generally planar workpiece; a motion controller operative to effect motion, relative to the workpiece, of at least an optical element of the video camera along an optical axis extending generally normally to a location on a surface of the workpiece, the video camera acquiring the at least two candidate images at selected time intervals, each of the at least two candidate images differing by at least one image parameter; an image selector operative to select an individual image from among the at least two candidate images according to predefined criteria of image quality; and a selected image analyzer operative to analyze at least a portion of the individual image selected by the image selector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.