Collection optics integrating an objective and a SIL
US7639025B2 · kind B2 · utility
11Cited by
37References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2006 |
| Grant date | Dec 29, 2009 |
| Priority date | — |
| Expiry date | Oct 2, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/24
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A collection optics arrangement integrating an objective lens and a solid immersion lens. An objective lens housing has an objective lens mounted inside. A solid immersion lens (SIL) housing is slidably mounted onto said objective lens housing, and a solid immersion lens is mounted onto the SIL housing. A spring imparts resilient force resisting the sliding of the solid immersion lens housing with respect to the objective lens housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.