Patent · US Expired

Semiconductor device having a pillar structure

US7642650B2 · kind B2 · utility

4Cited by
5References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 19, 2004
Grant dateJan 5, 2010
Priority date
Expiry dateFeb 19, 2024

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/12044
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a first multilayer interconnection structure formed on a substrate and a second multilayer interconnection structure formed on the first multilayer interconnection structure, wherein the first multilayer interconnection structure includes a pillar extending from a surface of the substrate and reaching at least the second multilayer interconnection structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.