Methods and apparatus for reducing noise in scatterometry measurements
US7643146B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 20, 2006 |
| Grant date | Jan 5, 2010 |
| Priority date | — |
| Expiry date | Apr 6, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2300/0829
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus for performing scatterometry measurements of biological samples as described herein. A substrate having formed therein one or more sample wells is provided. Each sample well is configured to hold a sample solution containing objects that are to be characterized based on their light scattering properties. One or more sample solutions are dispensed into the sample wells. A specular reflection reducing element is applied to at least some of the sample solutions in the sample wells to decrease reflections of light into one or more detectors. A light beam is directed from a light source onto the objects in the sample wells. Light scattered by the objects in the sample wells is collected and transmitted to one or more detectors. The signal from the detectors is analyzed to detect the one or more characteristics of the one or more samples.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.