Scanning probe microscope capable of measuring samples having overhang structure
US7644447B2 · kind B2 · utility
3Cited by
25References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2006 |
| Grant date | Jan 5, 2010 |
| Priority date | — |
| Expiry date | Dec 31, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a scanning probe microscope capable of precisely analyzing characteristics of samples having an overhang surface structure. The scanning probe microscope comprises a first probe, a first scanner changing a position of the first probe along a straight line, and a second scanner changing a position of a sample in a plane, wherein the straight line in which the position of the first probe is changed by using the first scanner is non-perpendicular to the plane in which the position of the sample is changed by using the second scanner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.