Patent · US Active

Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof

US7645989B2 · kind B2 · utility

7Cited by

6References

19Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Johannes Bihr · Aalen, DE
Friedhelm Panteleit · Aalen, DE
Tobias Clauss · Heidenheim, DE
Michael Budach · Hanau, DE

Key dates

Filing date	Sep 19, 2007
Grant date	Jan 12, 2010
Priority date	—
Expiry date	Jul 17, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31744
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The disclosure relates to a method for manufacturing an object with miniaturized structures. The method involves processing the object by supplying reaction gas during concurrent directing an electron beam onto a location to be processed, to deposit material or ablate material; and inspecting the object by scanning the surface of the object with an electron beam and leading generated backscattered electrons and secondary electrons to an energy selector, reflecting the secondary electrons from the energy selector, detecting the backscattered electrons passing the energy selector and generating an electron microscopic image of the scanned region in dependence on the detected backscattered electrons; and examining the generated electron microscopic image and deciding whether further depositing or ablating of material should be carried out. The disclosure also relates to an electron microscope and a processing system which are adapted for performing the method.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.