Patent · US Active

Graphics engine for high precision lithography

US7646919B2 · kind B2 · utility

5Cited by

37References

13Claims

0Family size

Assignee

Micronic Laser Systems AB · SE

Inventors

Martin Andreas Olsson · Lund, SE
Stefan Gustavson · Söderhamn, SE
Torbjorn Sandstrom · Mölnlycke, SE
Per Elmfors · Huddinge, SE

Key dates

Filing date	Nov 2, 2007
Grant date	Jan 12, 2010
Priority date	—
Expiry date	Jun 19, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG06T15/00
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The present invention includes a method to use a phase modulating micromirror array to create an intensity image that has high image fidelity, good stability through focus and good x-y symmetry. Particular aspects of the present invention are described in the claims, specification and drawings.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.