Active damping device for a positioning stage
US7649333B2 · kind B2 · utility
0Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2007 |
| Grant date | Jan 19, 2010 |
| Priority date | — |
| Expiry date | Feb 7, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49054
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A damping apparatus is provided for a positioning stage that is operative to move and position an object along a motion axis. The damping apparatus comprises a motion transformation device operative to rotate the positioning stage about a rotary axis that is substantially perpendicular to the motion axis, in response to forces generated to the positioning stage during acceleration or deceleration thereof. Resilient elements connected to the positioning stage serve to reduce transmission of vibration generated from the positioning stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.