Acceleration sensor
US7650787B2 · kind B2 · utility
13Cited by
7References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 20, 2005 |
| Grant date | Jan 26, 2010 |
| Priority date | — |
| Expiry date | Dec 27, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/1461
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor has a semiconductor acceleration sensor chip and a case. The semiconductor acceleration sensor chip has a fixed portion, a plummet portion surrounding the fixed portion without contacting the fixed portion, and a beam portion connecting the fixed portion and the plummet portion, the thickness of the beam portion being thinner than the thickness of the fixed portion. The case has a cavity housing the semiconductor acceleration sensor chip, and a projection portion formed on the bottom face of the cavity, the bottom face of the fixed portion being fixed to the top face of the projection portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.