Catalyst-aided chemical processing method and apparatus
US7651625B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 27, 2007 |
| Grant date | Jan 26, 2010 |
| Priority date | — |
| Expiry date | Aug 27, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J23/28
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A catalyst-aided chemical processing method can process hard-to-process materials, especially SiC, GaN, etc. whose importance as electronic device materials is increasing these days, with high processing efficiency and high precision even for a space wavelength range of not less than several tens of μm. The catalyst-aided chemical processing method comprises: putting a workpiece in a processing liquid in which halogen-containing molecules are dissolved; and moving the workpiece and a catalyst composed of molybdenum or a molybdenum compound relative to each other while keeping the catalyst in contact with or close proximity to a surface to be processed of the workpiece, thereby processing the surface of the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.