MEMS device with integrated optical element
US7652814B2 · kind B2 · utility
7Cited by
153References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2007 |
| Grant date | Jan 26, 2010 |
| Priority date | — |
| Expiry date | May 12, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
MEMS devices are fabricated by a method that involves forming an optical element (e.g., etalon) over a substrate and then forming a light modulating element (e.g., interferometric modulator) over the optical element. In an embodiment, a support structure for the light modulating element is aligned with the underlying optical element to thereby alter the appearance of the support structure to a viewer. Such an optical element is separated from the support structure by one or more buffer layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.