Patent · US Active

Line narrowing module

US7653112B2 · kind B2 · utility

3Cited by

21References

8Claims

0Family size

Assignee

Cymer, LLC · US

Inventors

Walter Dale Gillespie · Poway, US
Brian Strate · San Diego, US

Key dates

Filing date	Feb 28, 2008
Grant date	Jan 26, 2010
Priority date	—
Expiry date	Feb 28, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH01S3/2251
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.