Patent · US Active

Method for improving the reproducibility of a coordinate measuring apparatus and its accuracy

US7654007B2 · kind B2 · utility

2Cited by

7References

12Claims

0Family size

Assignee

Vistec Semiconductor Systems GmbH · DE

Inventors

Michael Heiden · Blieskastel, DE
Klaus Rinn · Heuchelheim, DE
Andreas Schaaf · Mittenaar, DE

Key dates

Filing date	May 27, 2008
Grant date	Feb 2, 2010
Priority date	—
Expiry date	Jul 1, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/03
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for improving the reproducibility of a coordinate measuring machine and its accuracy is disclosed. Using at least one measuring field of a camera, a plurality of images of at least one structure on the substrate are recorded. The substrate is placed on a measuring stage traversable in the X coordinate direction and the Y coordinate direction, the position of which is determined during imaging using a displacement measuring system. The measuring field is displaced by the amount of the deviation determined.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.