MEMS nanoindenter

US7654159B2 · kind B2 · utility

Assignee

• Nanofactory Instruments AB · SE

Inventors

• Peter Enoksson · Perstorp, SE
• Alexandra Nafari · Handen, SE
• Håkan Olin · Umeå, SE
• Fredrik Althoff · Mölnlycke, SE
• Andrey Danilov · Stans, CH
• Jens Dahlström · Timrå, SE

Key dates

• Filing date: Jan 26, 2005
• Grant date: Feb 2, 2010
• Expiry date: Aug 5, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T156/10
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A force sensor (200) and nanoidenation system (300) using such force sensor (200), wherein the force sensor (200) comprise a movable membrane (207) attached to a fixed bulk structure (210) with springs (201, 202, 203, 204) formed between the membrane (207) and bulk structure (210); the springs (201, 202, 203, 204) may be provided two on each side of a rectangular membrane(207) and each in the form of a U-shape with displacing elements (801) formed perpendicular to each open end of each U-shaped spring (800). The force sensor further comprises electrodes (206) for detecting capacitive changes between the movable membrane (207) and the electrodes (206) in order to measure a movement in relation to an applied force. The membrane (207) further comprises a probe holding structure (214) for providing a solution for interchangeable probes (211).