Method for nanostructuring of the surface of a substrate
US7655578B2 · kind B2 · utility
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29Claims
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Key dates
| Filing date | Jul 3, 2007 |
| Grant date | Feb 2, 2010 |
| Priority date | — |
| Expiry date | Feb 3, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0154
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Under consideration here is a method for the production of periodic nanostructuring on one of the surfaces of a substrate (10), presenting a periodic network of dislocations, embedded within a crystalline area (4) located in the neighborhood of an interface (5) between the crystalline material surfaces of two components (1, 2) assembled by bonding to form the substrate (10). It comprises the following steps:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.