Patent · US Active

Beam combiner employing a wedge-shaped cross-section

US7656583B2 · kind B2 · utility

1Cited by

5References

9Claims

0Family size

Assignee

Carl Zeiss Micromanaging GmbH · DE

Inventors

Michael Goelles · Jena, DE
Ralf Netz · Jena, DE
Marcus Heidkamp · Jena, DE
Joerg-Michael Funk · Arth, CH

Key dates

Filing date	Apr 6, 2007
Grant date	Feb 2, 2010
Priority date	—
Expiry date	Apr 6, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/0064
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A beam corradiator for combining two radiation beams, preferably movable beams independent from each other in at least one direction, to scan and/or influence a sample, preferably a manipulation system and an imaging system, with a partially reflecting layer being provided for the corradiation, wherein the thickness of the layer is provided with a preferably consistent incline or decline over the optically effective cross-section of the beam corradiatior.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.